Selective Reactive Ion Etching of P-Doped Polysilicon Using a Cl2/HBr Mixture
Trion Tool: Minilock-Phantom III RIE
“In this letter, a technique for carrying out smooth, selective, and anisotropic etching of p-doped polysilicon will be presented. …” Read the full article >>
PAPER: Controlled Multi-Batch Self-Assembly of Micro Devices
By Xiaorong Xiong, Yael Hanein, Jiandong Fang, Yanbing Wang, Weihua Wang, Daniel, T. Schwartz and Karl F. Bohringer (University of Washington)
Application: MEMS
Trion Tool: RIE
http://www.ee.washington.edu/research/mems/selfassembly/index.htm
PAPER: Double-Sided Micromachining Process for Silicon Cantilever Using a Parallel Capacitively Coupled Plasma
By Wei-Chih Wang, Joe Nhut Ho, and Per G. Reinhall (University of Washington)
Application: MEMS
Trion Tool: Phantom RIE
link.aip.org/link/?JMMMGF/4/013010/1
PAPER: Fully Micromachined Power Combining Module for Millimeter-Wave Applications
By Yongshik Lee (University of Michigan)
Application: MEMS – Deep GaAs Etch
Trion Tool: RIE, Oracle Plasma Etch & Deposition System with Electrostatic chuck and He backside cooling
www.eecs.umich.edu/RADLAB/html/NEWDISS/Lee.pdf
PAPER: Low-Stress Silicon Carbonitride for the Machining of High-Frequency Nanomechanical Resonators
By Lee M. Fischer, Neal Wilding, Murat Gel, and Stephane Evoy (University of Alberta)
Application: Deposition, MEMS
Trion Tool: Phantom RIE; Orion PECVD
link.aip.org/link/?JVTBD9/25/33/1
PAPER: Micromachining of Non-Fouling Coatings for Bio-MEMS Applications
By Yael Hanein, Y. Vickie Pan, Buddy D. Ratner, Denice D. Denton, Karl F. Bohringer (University of Washington)
Application: MEMS
Trion Tool: RIE
www.ee.washington.edu/research/mems/biocompatible/index.htm
PAPER: Thermal Cycling Design Alternatives for the Polymerase Chain Reaction
By Monte Lewis (University of Maryland)
Application: MEMS – Medical
Trion Tool: Minilock-Phantom RIE
http://hdl.handle.net/1903/3061
Oracle Plasma Etch & Deposition System
Minilock-Phantom III RIE
Minilock-Phantom III RIE/ICP
Phantom III RIE
Orion III PECVD