Apollo Stripper
The cost of new stripping systems has escalated to unreasonable levels. Trion has solved this critical problem. The Apollo Stripper is a compact, inexpensive, and versatile system which can be configured for a 200mm or 300mm Chuck. By employing RF bias power, difficult to remove layers of resist can be removed at low temperatures. As required by application, this system can incorporate a microwave source (which is both reliable and free from typical microwave tuning problems) or ICP technology.
View the Apollo and Gemini in Action!
The [Apollo] system is working in production almost a year, with close to zero down time (single event of particles released from the Viton O-Rings that were de-composed — I changed the O-Rings and clean and it went back to normal). They only clean the chamber and it runs and runs!” – Trion Customer (Israel)
MEMS, Compound Semiconductor, Pilot Line Production.