200th machine ships.
read moreTrion delivers the first fully-automated systems for high volume production. Trion sets up a fully equipped lab for demo and process development in Tempe. Trion purchases and moves into new, larger facilities on South 52nd Street in Tempe.
read more150th machine ships.
read moreTrion introduces the Oracle, a flexible, low-cost turnkey cluster tool capable of supporting independent process reaction chambers for etch, deposition and sputtering of chlorinated or fluorinated chemistries.
read more50th machine ships.
read moreTrion begins manufacturing and service of the Orion PECVD system and Phantom RIE tool to semiconductor research and development companies, universities and foundries.
read moreTrion begins a joint development project with SEMATECH on liquid source silicon nitride, elimination of silane for safety concerns. Trion relocates to Tempe, Arizona.
read more25th machine ships.
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