APPLICATION NOTES:
Phantom RIE Failure Analysis Datasheet
Silicon Oxide, Silicon Nitride, Bulk Silicon, Photoresist, Polyimide.
Phantom RIE ICP Failure Analysis Datasheet
Silicon Oxide, Silicon Nitride, Bulk Silicon, Photoresist, Polyimide.
Aluminum Etch
Application: Failure Analysis, Metal Etching Aluminum
Trion Tool: Minilock-Phantom RIE
“Etching was done using Boron Tri-chloride (BCI3) and Chlorine (CI2) gas …”
Aluminum Etch
Application: Failure Analysis, Metal Etching Aluminum
Trion Tool: Minilock-Phantom RIE
“Aluminum etching is one of the most difficult processes. However, if done correctly very good etch results can be obtained. A good starting recipe for more uniform but isotropic etching of the Al is …”
Anisotropic Dielectric Removal vs. Sequential Removal
Application: Failure Analysis, Dielectric Etching
Anisotropic Etching of Polymers
Application: Failure Analysis, Dielectric Etching, Silicon Etching
Trion Tool: Phantom RIE
RIE Grass
Application: Failure Analysis, Dielectric Etching, Silicon Etching
Silicon Dioxide Etch
Application: Failure Analysis, Dielectric Etching, Silicon Etching
Trion Tool: Phantom RIE
Silicon Nitride Etch
Application: Failure Analysis, Dielectric Etching, Silicon Etching
Trion Tool: Phantom RIE
PAPERS:
Amorphous silicon thin-film transistors with 90° vertical nanoscale channel
by Isaac Chan and Arokia Nathan
Application: Failure Analysis, Dielectric Etching, Silicon Etching
Trion Tool: Phantom RIE
Plasma Basics & History of Plasma Reactors
Application: Failure Analysis
Rapid Integrated Circuit Delayering Without Grass
by W. Vanderlinde and C. Von Benken (Microelectronics Research Laboratory, Columbia, MD) and A. Crockett (Trion Technology)
Application: Failure Analysis, Dielectric Etching, Silicon Etching
Trion Tool: Minilock-Phantom RIE
Reliability Issues And Advanced Failure Analysis Deprocessing Techniques For Copper/Low-K Technology
by H. Wu, J. Cargo, C. Peridier and J. Serpiello (Agere Systems, IC Quality Organization, Product Analysis Lab, Allentown, PA)
Application: Failure Analysis, Dielectric Etching, Metal Etching Copper
Trion Tool: Phantom RIE
PROCESS DEVELOPMENT:
PROCESSING TECHNIQUES: