Deposition Products

These process modules are used to deposit thin films onto a substrate.


Orion PECVD

Orion PECVD

Orion HDCVD

Orion HDCVD

Minilock PECVD

Minilock PECVD

Minilock PVD

Minilock PVD


Minilock ALD

Minilock ALD

Minilock Duo

Minilock Duo

Titan Deposition

Titan Deposition

Oracle Cluster

Oracle Cluster


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