Trion begins manufacturing and service of the Orion PECVD system and Phantom RIE tool to semiconductor research and development companies, universities and foundries.
Learn MoreTrion begins a joint development project with SEMATECH on liquid source silicon nitride, elimination of silane for safety concerns. Trion relocates to Tempe, Arizona.
Learn MoreTrion begins manufacturing and service of the Minilock-Phantom (a loadlocked RIE tool) to semiconductor research and development companies, universities and foundries.
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