2006

Trion sets up a service office for Malaysia, Singapore, Thailand and Philippines

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350th machine ships.

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At SEMICON West 2006, Trion introduces the Apollo: an affordable photoresist stripper.

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University of Massachusetts receives $700K grant to establish Nano-Imprint Lithography Lab (Trion Phantom RIE). Full article at www.nanotechnology.com.

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2005

Trion develops and releases a competitively-priced multi-chamber photoresist stripper. Trion releases a DRIE system for MEMS applications.

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2004

300th machine ships.

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2002

Trion sets up an on-site 12,000 sq. ft. machine shop in Clearwater, enabling faster production and more competitive pricing.

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2001

Trion completes a 4,000 sq. ft. expansion to the Tempe facility. Trion moves all manufacturing operations to a 10,000 sq. ft. building in Clearwater.

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200th machine ships.

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2000

Trion delivers the first fully-automated systems for high volume production. Trion sets up a fully equipped lab for demo and process development in Tempe. Trion purchases and moves into new, larger facilities on South 52nd Street in Tempe.

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150th machine ships.

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1998

Trion introduces the Oracle, a flexible, low-cost turnkey cluster tool capable of supporting independent process reaction chambers for etch, deposition and sputtering of chlorinated or fluorinated chemistries.

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