200th machine ships.
Trion delivers the first fully-automated systems for high volume production.
Trion sets up a fully equipped lab for demo and process development in Tempe.
Trion purchases and moves into new, larger facilities on South 52nd Street in Tempe.
150th machine ships.
Trion introduces the Oracle, a flexible, low-cost turnkey cluster tool capable of supporting independent process reaction chambers for etch, deposition and sputtering of chlorinated or fluorinated chemistries.
Trion expands into a new facility on Park Lane in Tempe.
Trion expands sales and services offices in Europe and Asia.
50th machine ships.
Trion begins manufacturing and service of the Orion PECVD system and Phantom RIE tool to semiconductor research and development companies, universities and foundries.
Trion begins a joint development project with SEMATECH on liquid source silicon nitride, elimination of silane for safety concerns.
Trion relocates to Tempe, Arizona.
25th machine ships.