Annual Preventative Maintenance program

Many Trion Technology Customers have found that proper maintenance of their Trion system is fundamental in optimizing uptime, reliability, and repeatable process performance.
To improve Trion’s support to you and to give a better advantage of improving the performance of your Trion system, we are pleased to offer our Annual Preventative Maintenance program.
This Preventive Maintenance program includes a comprehensive inspection of your system along with
the following activities:

  • Verification of proper operation for all gauges and meters
  • Verification of proper operation of the RF Generator system(s)
  • Optimization of Wafer placement accuracy
  • Inspection of all Process Module consumable parts and replacement(s) as needed

The PM will be performed at a mutually agreed upon date with Trion recommending appropriate alternate dates for your convenience. The primary factors determining the ideal schedule include system age, process gases, usage level, and the amount of time since the last preventive maintenance service was performed.
Trion Technology will also provide a specific list of parts to be inspected and if necessary, replaced. Trion will ship applicable parts (PM Kit) to your facility two weeks prior to your scheduled PM.
This program will enable Trion to collect and maintain baseline data specific to your Trion system. This data can be valuable as a troubleshooting aid for your company should you see a process shift due to a defective or drifting component. It can also be used as a guide to possible upgrades and retrofits that are available for your system to increase performance and improve process specifications.
If you have any questions or would like more information concerning this program please do not hesitate to contact us at service@triontech.com.
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