Deposition

A technique that allows thin films to be deposited onto the surface of a substrate

APPLICATION NOTES:

PECVD DES Silicon Nitride

PECVD TEOS Silicon Oxide

Process Development


Materials supported by Trion’s tools for DEPOSITION include:

MATERIALGAS USED
OxideTEOS + O2
Oxide – faster depositionSiH4 + N20 +N2
NitrideNH3 + DES + N2
Nitride – faster depositionN2 + NH3 + SiH4
Silicon carbideTrimethylsilane or Methane (CH4) & SiH4

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