Gemini Multi-Chamber Stripper

Gemini

Gemini Multi-Chamber Stripper

The Gemini is a compact multi-chamber, high throughput stripping system that is designed specifically for the demands of today’s production fabs. This versatile and affordable system can be configured with a 200mm or 300mm chuck. As required by application, this system can incorporate a microwave source (which is both reliable and free from typical microwave tuning problems) or ICP technology.

By employing ICP, microwave and RF bias power difficult to remove layers of resist can be removed at low temperatures.

  • Etch rates up to 6um/min
  • High throughput
  • Low plasma damage
  • Automatic tuning
  • 100mm to 300mm wafers
  • Small footprint
  • Competitively priced

View the Apollo and Gemini in Action!


Applications:

MEMS, Compound Semiconductor, Advanced Packaging.


Gemini Multi-Chamber Stripper

Stripper CHARM®-2 Report and Wafer Maps

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